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Polishing fluid for metal and polishing method
A Standard patent application filed on 13 June 2003 credited to Ono, Hiroshi ; Habiro, Masanobu ; Masuda, Katsuyuki
Details
Application number :
2003242397
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Polishing fluid for metal and polishing method
Inventor :
Ono, Hiroshi ; Habiro, Masanobu ; Masuda, Katsuyuki
Agent name :
Address for service :
Filing date :
13 June 2003
Associated companies :
Applicant name :
HITACHI CHEMICAL CO., LTD.
Applicant address :
1-1, Nishishinjuku 2-chome, Shinjuku-ku, Tokyo 163-0449
Old name :
Original Source :
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