Discharging power source, sputtering power source, and sputtering device
A Standard patent application filed on 30 May 2003 credited to Kuriyama, Noboru
;
Imagawa, Kazuhiko
Details
Application number :
2003241958
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Discharging power source, sputtering power source, and sputtering device
Inventor :
Kuriyama, Noboru
;
Imagawa, Kazuhiko
Agent name :
Address for service :
Filing date :
30 May 2003
Associated companies :
Applicant name :
SHIBAURA MECHATRONICS CORPORATION
Applicant address :
5-1, Kasama 2-chome, Sakae-ku, Yokohama-shi, Kanagawa 247-8560