Details
- Application number :
- 2002338086
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Power supply for sputtering
- Inventor :
- Kuriyama, Noboru
;
Imagawa, Kazuhiko
- Agent name :
-
- Address for service :
-
- Filing date :
- 25 September 2002
- Associated companies :
-
- Applicant name :
- SHIBAURA MECHATRONICS CORPORATION
- Applicant address :
- 5-1, Kasama 2-chome, Sakae-ku, Yokohama-shi, Kanagawa 247-8610
- Old name :
-
- Original Source :
- Go