Micro-mechanical system employing electrostatic actuator and fabrication methods of same
A Standard patent application filed on 13 May 2003 credited to Abu-Ageel, Nayef M.
Details
Application number :
2003239515
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Micro-mechanical system employing electrostatic actuator and fabrication methods of same