Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof
A Standard patent application filed on 10 December 2002 credited to Abu-Ageel, Nayef M.
Details
Application number :
2002359655
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof