Extreme ultraviolet light source
A Standard patent application filed on 09 April 2003 credited to Rettig, Curtis L.
;
Blumenstock, Gerry M.
;
Oliver, I. Roger
;
Fomenkov, Igor V.
;
Hoffman, Jerzy R.
;
Bowering, Norbert
;
Partlo, William N.
;
Johnson, R. Mark
;
Ness, Richard M.
;
Simmons, Rodney D.
;
Melnychuk, Stephen T.
Details
Application number :
2003230870
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Extreme ultraviolet light source
Inventor :
Rettig, Curtis L.
;
Blumenstock, Gerry M.
;
Oliver, I. Roger
;
Fomenkov, Igor V.
;
Hoffman, Jerzy R.
;
Bowering, Norbert
;
Partlo, William N.
;
Johnson, R. Mark
;
Ness, Richard M.
;
Simmons, Rodney D.
;
Melnychuk, Stephen T.
Agent name :
Address for service :
Filing date :
09 April 2003
Associated companies :
Applicant name :
Cymer, Inc.
Applicant address :
Legal Department - M/S 4-2C
17075 Thornmint Court,
San Diego, CA 92127-2413
United States of America