Extreme ultraviolet light source and target for extreme ultraviolet light source
A Standard patent application filed on 26 December 2003 credited to Sunahara, Atsushi ; Shimada, Yoshinori ; Furukawa, Hiroyuki ; Nishihara, Katsunobu ; Nagai, Keiji ; Shigemori, Keisuke ; Nakatsuka, Masahiro ; Murakami, Masakatsu ; Nakai, Mitsuo ; Miyanaga, Noriaki ; Matsui, Ryouji

Details

Application number :

2003296155  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Extreme ultraviolet light source and target for extreme ultraviolet light source  

Inventor :

Sunahara, Atsushi ; Shimada, Yoshinori ; Furukawa, Hiroyuki ; Nishihara, Katsunobu ; Nagai, Keiji ; Shigemori, Keisuke ; Nakatsuka, Masahiro ; Murakami, Masakatsu ; Nakai, Mitsuo ; Miyanaga, Noriaki ; Matsui, Ryouji  

Agent name :

 

Address for service :

 

Filing date :

26 December 2003  

Associated companies :

 

Applicant name :

KANSAI TECHNOLOGY LICENSING ORGANIZATION CO., LTD.  

Applicant address :

93, Chudoji Awata-cho, Shimogyo-ku, Kyoto-shi, Kyoto 600-8815  

Old name :

 

Original Source :

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