Method and apparatus for shaping thin films in the near-edge regions of in-process semiconductor substrates
A Standard patent application filed on 24 April 2003 credited to Robbins, Michael D.

Details

Application number :
2003225127  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for shaping thin films in the near-edge regions of in-process semiconductor substrates  
Inventor :
Robbins, Michael D.  
Agent name :
 
Address for service :
 
Filing date :
24 April 2003  
Associated companies :
 
Applicant name :
ACCRETECH USA, INC.  
Applicant address :
48 Spruce Street, Oakland, NJ 07436  
Old name :
 
Original Source :
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Same Inventor