Micro electro-mechanical system method
A Standard patent application filed on 17 March 2003 credited to Liu, Junhua
;
Lempkowski, Robert B.
;
Eliacin, Manes
;
Lian, Keryn
Details
Application number :
2003224701
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Micro electro-mechanical system method
Inventor :
Liu, Junhua
;
Lempkowski, Robert B.
;
Eliacin, Manes
;
Lian, Keryn