Micro-electro mechanical system and method of making
A Standard patent application filed on 13 July 2002 credited to Skipor, Andrew
;
Tungare, Aroon
;
Ghaem, Sanjar
;
Chason, Marc
;
Gamota, Daniel
Details
Application number :
2002356062
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Micro-electro mechanical system and method of making
Inventor :
Skipor, Andrew
;
Tungare, Aroon
;
Ghaem, Sanjar
;
Chason, Marc
;
Gamota, Daniel