Plasma processing device and plasma generating method

Application number :: 2003221359
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Plasma processing device and plasma generating method
Inventor :: Ando, Makoto ; Yasaka, Yasuyoshi ; Ishii, Nobuo ; Takahashi, Masaharu
Agent name :
Address for service :
Filing date :: 12 March 2003
Associated companies :
Applicant name :: ANDO, Makoto
Applicant address :: 1-1-I-312, Ogura, Saiwai-ku, Kawasaki-shi, Kanagawa 211-0954
Old name :
Original Source :: Go

Plasma processing device and plasma generating method A Standard patent application filed on 12 March 2003 credited to Ando, Makoto ; Yasaka, Yasuyoshi ; Ishii, Nobuo ; Takahashi, Masaharu