Parametric profiling using optical spectroscopic systems

Application number :: 2002360738
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Parametric profiling using optical spectroscopic systems
Inventor :: Levy, Ady ; Fabrikant, Anatoly ; Shchegrov, Andrei V. ; Mieher, Walter ; Nikoonahad, Mehrdad ; Bareket, Noah ; Dziura, Ted ; Wack, Daniel C.
Agent name :
Address for service :
Filing date :: 19 December 2002
Associated companies :
Applicant name :: KLA-TENCOR TECHNOLOGIES CORPORATION
Applicant address :: 160 Rio Robles, San Jose, CA 95134-1809 United States of America
Old name :
Original Source :: Go

Parametric profiling using optical spectroscopic systems A Standard patent application filed on 19 December 2002 credited to Levy, Ady ; Fabrikant, Anatoly ; Shchegrov, Andrei V. ; Mieher, Walter ; Nikoonahad, Mehrdad ; Bareket, Noah ; Dziura, Ted ; Wack, Daniel C.