Parametric profiling using optical spectroscopic systems
A Standard patent application filed on 18 December 2001 credited to Fabrikant, Anatoly ; Nikoonahad, Mehrdad ; Shchegrov, Andrei V.

Details

Application number :

2002231003  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Parametric profiling using optical spectroscopic systems  

Inventor :

Fabrikant, Anatoly ; Nikoonahad, Mehrdad ; Shchegrov, Andrei V.  

Agent name :

 

Address for service :

 

Filing date :

18 December 2001  

Associated companies :

 

Applicant name :

Kla-Tencor Corporation  

Applicant address :

 

Old name :

 

Original Source :

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