Laser spectral engineering for lithographic process

Application number :: 2002355718
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Laser spectral engineering for lithographic process
Inventor :: Kroyan, Armen ; Fomenkov, Igor V. ; Lalovic, Ivan ; Spangler, Ronald L. ; Rule, John A. ; Algots, John M. ; Jacques, Robert N. ; Lipcon, Jacob P.
Agent name :
Address for service :
Filing date :: 11 July 2002
Associated companies :
Applicant name :: Cymer, Inc.
Applicant address :: Legal Department - M/S 4-2C 17050Thornmint Court San Diego, CA 92127-2413 United States of America
Old name :
Original Source :: Go

Laser spectral engineering for lithographic process A Standard patent application filed on 11 July 2002 credited to Kroyan, Armen ; Fomenkov, Igor V. ; Lalovic, Ivan ; Spangler, Ronald L. ; Rule, John A. ; Algots, John M. ; Jacques, Robert N. ; Lipcon, Jacob P.