Laser spectral engineering for lithographic process

Application number :: 2002303412
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Laser spectral engineering for lithographic process
Inventor :: Kroyan, Armen ; Fomenkov, Igor ; Lalovic, Ivan ; Sandstrom, Richard L. ; Ahmed, Khurshid ; Das, Palash P. ; Algots, John M.
Agent name :
Address for service :
Filing date :: 19 April 2002
Associated companies :
Applicant name :: CYMER, INC.
Applicant address :: 16750 Via Del Campo Court, San Diego, CA 92127-1712
Old name :
Original Source :: Go

Laser spectral engineering for lithographic process A Standard patent application filed on 19 April 2002 credited to Kroyan, Armen ; Fomenkov, Igor ; Lalovic, Ivan ; Sandstrom, Richard L. ; Ahmed, Khurshid ; Das, Palash P. ; Algots, John M.