Toggle navigation
PATENT LOOKUP
Home
About
Search Tips
Search
Micromachining method using ionbeam
A Standard patent application filed on 06 August 2002 credited to Sano, Naokatsu ; Asaoka, Yasushi ; Kaneko, Tadaaki
Details
Application number :
2002355510
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Micromachining method using ionbeam
Inventor :
Sano, Naokatsu ; Asaoka, Yasushi ; Kaneko, Tadaaki
Agent name :
Address for service :
Filing date :
06 August 2002
Associated companies :
Applicant name :
THE NEW INDUSTRY RESEARCH ORGANIZATION
Applicant address :
1-5-2, Minatojima-minamimachi, Chuo-ku, Kobe-shi, Hyogo 650-0047
Old name :
Original Source :
Go
Same Inventor
Method for ion beam fine patterning of inorganic multilayer resist,...
PATENT LOOKUP
Home
Browse
About
Search Tips