Plasma treatment apparatus, matching box, impedance matching device, and coupler
A Standard patent application filed on 13 December 2002 credited to Higashiura, Tsutomu

Details

Application number :
2002354234  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Plasma treatment apparatus, matching box, impedance matching device, and coupler  
Inventor :
Higashiura, Tsutomu  
Agent name :
 
Address for service :
 
Filing date :
13 December 2002  
Associated companies :
 
Applicant name :
TOKYO ELECTRON LIMITED  
Applicant address :
3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481  
Old name :
 
Original Source :
Go  

Same Inventor