Details

Application number :
2002345979  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus to reduce effects of sheared wavefronts on interferometric phase measurements  
Inventor :
Hill, Henry A.  
Agent name :
 
Address for service :
 
Filing date :
27 June 2002  
Associated companies :
 
Applicant name :
ZYGO CORPORATION  
Applicant address :
21 Laurel Brook Road, Middlefield, CT 06455-0448  
Old name :
 
Original Source :
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Same Inventor