Cyclic error reduction in average interferometric position measurements
A Standard patent application filed on 13 March 2002 credited to Hill, Henry A.

Details

Application number :
2002257034  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Cyclic error reduction in average interferometric position measurements  
Inventor :
Hill, Henry A.  
Agent name :
 
Address for service :
 
Filing date :
13 March 2002  
Associated companies :
 
Applicant name :
ZYGO CORPORATION  
Applicant address :
21 Laurel Brook Road, Middlefield, CT 06455-0448  
Old name :
 
Original Source :
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Same Inventor