Electrostatically actuated micro-electro-mechanical devices and method of manufacture
A Standard patent application filed on 15 March 2002 credited to Mastrangelo, Carlos Horacio ; Wang, Chanche ; Shedd, Gordon M. ; Kudrle, Thomas David ; Hsiao, James Ching-Ming ; Waelti, Marc ; Bancu, Mirela Gabriela ; Kirkos, Gregory A.

Details

Application number :
2002338254  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Electrostatically actuated micro-electro-mechanical devices and method of manufacture  
Inventor :
Mastrangelo, Carlos Horacio ; Wang, Chanche ; Shedd, Gordon M. ; Kudrle, Thomas David ; Hsiao, James Ching-Ming ; Waelti, Marc ; Bancu, Mirela Gabriela ; Kirkos, Gregory A.  
Agent name :
 
Address for service :
 
Filing date :
15 March 2002  
Associated companies :
 
Applicant name :
CORNING INTELLISENSE CORPORATION  
Applicant address :
36 Jonspin Road, Wilmington, MA 01887  
Old name :
 
Original Source :
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