Electrostatically actuated micro-electro-mechanical devices and method of manufacture
A Standard patent application filed on 15 March 2002 credited to Andosca, Robert G.
Details
Application number :
2002338253
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Electrostatically actuated micro-electro-mechanical devices and method of manufacture