Method and apparatus for forming film
A Standard patent application filed on 30 August 2002 credited to Miyoshi, Hidenori ; Sugiura, Masahito ; Kashiwagi, Yusaku ; Kagawa, Yoshihisa ; Ohta, Tomohiro

Details

Application number :
2002338200  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for forming film  
Inventor :
Miyoshi, Hidenori ; Sugiura, Masahito ; Kashiwagi, Yusaku ; Kagawa, Yoshihisa ; Ohta, Tomohiro  
Agent name :
 
Address for service :
 
Filing date :
30 August 2002  
Associated companies :
 
Applicant name :
TOKYO ELECTRON LIMITED  
Applicant address :
3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481  
Old name :
 
Original Source :
Go  

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