Details
- Application number :
- 2002336269
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Combined plasma/liquid cleaning of substrates
- Inventor :
- Henins, Ivars
;
Selwyn, Gary S.
- Agent name :
-
- Address for service :
-
- Filing date :
- 07 March 2002
- Associated companies :
-
- Applicant name :
- THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Applicant address :
- Los Alamos National Laboratory, LC/IP, MS A187, Los Alamos, NM 87545
- Old name :
-
- Original Source :
- Go