Plasma processor and plasma processing method
A Standard patent application filed on 04 September 2002 credited to Kobayashi, Yoshiyuki ; Nagakubo, Keiichi

Details

Application number :
2002328421  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Plasma processor and plasma processing method  
Inventor :
Kobayashi, Yoshiyuki ; Nagakubo, Keiichi  
Agent name :
 
Address for service :
 
Filing date :
04 September 2002  
Associated companies :
 
Applicant name :
TOKYO ELECTRON LIMITED  
Applicant address :
3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481  
Old name :
 
Original Source :
Go  

Related Patents