Details
- Application number :
- 2002315758
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Plasma processor and plasma processing method
- Inventor :
- Kikuchi, Akihiro
;
Oohashi, Kaoru
;
Higuchi, Kimihiro
;
Shibuya, Munehiro
;
Sakamoto, Yuichiro
;
Shima, Shinya
;
Gondai, Tadashi
;
Ueda, Takehiro
;
Kayamori, Satoshi
- Agent name :
-
- Address for service :
-
- Filing date :
- 02 July 2002
- Associated companies :
-
- Applicant name :
- TOKYO ELECTRON LIMITED
- Applicant address :
- 3-6, Akasaka 5-Chome, Minato-ku, Tokyo 107-8481
- Old name :
-
- Original Source :
- Go