Semiconductor wafer container cleaning apparatus
A Standard patent application filed on 20 June 2001 credited to Bexten, Daniel P. ; Norby, Jerry R. ; Bryer, James

Details

Application number :

2002216646  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Semiconductor wafer container cleaning apparatus  

Inventor :

Bexten, Daniel P. ; Norby, Jerry R. ; Bryer, James  

Agent name :

 

Address for service :

 

Filing date :

20 June 2001  

Associated companies :

 

Applicant name :

Semitool, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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