Apparatus and method for determining clamping status of semiconductor wafer
A Standard patent application filed on 09 May 2002 credited to Mitrovic, Andrej
;
Jones, William
;
Moroz, Paul
Details
Application number :
2002316082
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Apparatus and method for determining clamping status of semiconductor wafer
Inventor :
Mitrovic, Andrej
;
Jones, William
;
Moroz, Paul
Agent name :
Address for service :
Filing date :
09 May 2002
Associated companies :
Applicant name :
TOKYO ELECTRON LIMITED
Applicant address :
TBS Broadcast Center, 3-6 Akasaka 5-chome, Minato-ku, Tokyo 107-8481