Plasma chamber wall segment temperature control
A Standard patent application filed on 19 July 2002 credited to Mitrovic, Andrej ; Long, Maolin ; Jones, William ; Fink, Steven ; Moroz, Paul

Details

Application number :

2002319624  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Plasma chamber wall segment temperature control  

Inventor :

Mitrovic, Andrej ; Long, Maolin ; Jones, William ; Fink, Steven ; Moroz, Paul  

Agent name :

 

Address for service :

 

Filing date :

19 July 2002  

Associated companies :

 

Applicant name :

TOKYO ELECTRON LIMITED  

Applicant address :

TBS Broadcast Center, 3-6, Akasaka 5-chome, Minato-ku, Tokyo 107  

Old name :

 

Original Source :

Go