Details
- Application number :
- 2002302424
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method and device for generating euv radiation
- Inventor :
- Chichkov, Boris
;
Egbert, Andre
- Agent name :
-
- Address for service :
-
- Filing date :
- 13 March 2002
- Associated companies :
-
- Applicant name :
- LZH LASERZENTRUM HANNOVER E.V.
- Applicant address :
- Hollerithallee 8, 30419 Hannover
- Old name :
-
- Original Source :
- Go
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