Device and method for generating uv radiation, in particular euv radiation
A Standard patent application filed on 05 September 2003 credited to Egbert, Andre ; Chichkov, Boris ; Becker, Stefan ; Appelt, Helmut ; Neuser, Eberhard

Details

Application number :

2003271762  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Device and method for generating uv radiation, in particular euv radiation  

Inventor :

Egbert, Andre ; Chichkov, Boris ; Becker, Stefan ; Appelt, Helmut ; Neuser, Eberhard  

Agent name :

 

Address for service :

 

Filing date :

05 September 2003  

Associated companies :

 

Applicant name :

PHOENIX EUV SYSTEMS+ SERVICES GMBH  

Applicant address :

Niels-Bohr-Strasse 7, 31315 Wunstorf  

Old name :

 

Original Source :

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