A method for fabricating a structure for a microelectromechanical systems (mems) device
A Standard patent application filed on 29 April 2002 credited to Miles, Mark W.
Details
Application number :
2002256386
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
A method for fabricating a structure for a microelectromechanical systems (mems) device
Inventor :
Miles, Mark W.
Agent name :
Address for service :
Filing date :
29 April 2002
Associated companies :
Applicant name :
IRIDIGM DISPLAY CORPORATION
Applicant address :
Suite 235, 2415 Third Street, San Francisco, CA 94107