Details

Application number :
2002250464  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Stacked rf excitation coil for inductive plasma processor  
Inventor :
Chen, Jian J. ; Wicker, Thomas E. ; Veltrop, Robert G.  
Agent name :
 
Address for service :
 
Filing date :
29 March 2002  
Associated companies :
 
Applicant name :
LAM RESEARCH CORPORATION  
Applicant address :
4650 Cushing Parkway, Fremont, CA 94538-6516  
Old name :
 
Original Source :
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Same Inventor