System and method for making thin-film structures using a stepped profile mask
A Standard patent application filed on 13 March 2002 credited to Hylton, Todd Lanier
;
Baldwin, David Alan
Details
Application number :
2002250311
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
System and method for making thin-film structures using a stepped profile mask