Projection optical system and production method therefor, exposure system and production method therefor, and production method for microdevice
A Standard patent application filed on 25 December 2001 credited to Matsuyama, Tomoyuki
Details
Application number :
2002219528
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Projection optical system and production method therefor, exposure system and production method therefor, and production method for microdevice
Inventor :
Matsuyama, Tomoyuki
Agent name :
Address for service :
Filing date :
25 December 2001
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331