Four khz gas discharge laser
A Standard patent application filed on 23 May 2001 credited to Rettig, Curtis L. ; Pan, Xiaojiang J. ; Fomenkov, Igor V ; Algots, John M. ; Mecher, Paul C. ; Newman, Peter C. ; Ujazdowski, Richard C. ; Sandstrom, Richard L ; Ness, Richard M. ; Shannon, Robert A. ; Saethre, Robert B.

Details

Application number :

2001294509  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Four khz gas discharge laser  

Inventor :

Rettig, Curtis L. ; Pan, Xiaojiang J. ; Fomenkov, Igor V ; Algots, John M. ; Mecher, Paul C. ; Newman, Peter C. ; Ujazdowski, Richard C. ; Sandstrom, Richard L ; Ness, Richard M. ; Shannon, Robert A. ; Saethre, Robert B.  

Agent name :

 

Address for service :

 

Filing date :

23 May 2001  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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