Four khz gas discharge laser system
A Standard patent application filed on 15 April 2002 credited to Ivaschenko, Alex P.
;
Partlo, William N.
;
Titus, Clay C.
;
Rettig, Curtis L.
;
Johns, David M.
;
Padmabandu, Gamaralalage G.
;
Fomenkov, Igor
;
Emilo, Jerome A.
;
Algots, John M.
;
Branham, Mark S.
;
Zambon, Paolo
Details
Application number :
2002307368
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Four khz gas discharge laser system
Inventor :
Ivaschenko, Alex P.
;
Partlo, William N.
;
Titus, Clay C.
;
Rettig, Curtis L.
;
Johns, David M.
;
Padmabandu, Gamaralalage G.
;
Fomenkov, Igor
;
Emilo, Jerome A.
;
Algots, John M.
;
Branham, Mark S.
;
Zambon, Paolo
Agent name :
Address for service :
Filing date :
15 April 2002
Associated companies :
Applicant name :
CYMER, INC.
Applicant address :
(a Nevada corporation), 16750 Via Del Campo Court, San Diego, CA 92127-1712