Apparatus and method for processing a microelectronic workpiece using metrology
A Standard patent application filed on 09 July 2001 credited to Wilson, Gregory J. ; Ritzdorf, Thomas L. ; Eudy, Steve L. ; Mchugh, Paul R.

Details

Application number :
2001271923  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Apparatus and method for processing a microelectronic workpiece using metrology  
Inventor :
Wilson, Gregory J. ; Ritzdorf, Thomas L. ; Eudy, Steve L. ; Mchugh, Paul R.  
Agent name :
 
Address for service :
 
Filing date :
09 July 2001  
Associated companies :
 
Applicant name :
Semitool, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor