Details
- Application number :
- 2001281306
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Adjustable segmented electrode apparatus and method
- Inventor :
- Long, Maolin
- Agent name :
-
- Address for service :
-
- Filing date :
- 10 July 2001
- Associated companies :
-
- Applicant name :
- Tokyo electron Limited
- Applicant address :
-
- Old name :
-
- Original Source :
- Go