Methods for forming rough ruthenium-containing layers and structures/methods using same
A Standard patent application filed on 07 June 2001 credited to Agarwal, Vishnu K.
;
Derderian, Garo
Details
Application number :
2001267039
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Methods for forming rough ruthenium-containing layers and structures/methods using same