Method for measuring diffusion of photogenerated catalyst in chemically amplified resists
A Standard patent application filed on 17 April 2001 credited to Grober, Robert D.
;
Feke, Gilbert D.
Details
Application number :
2001253582
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Method for measuring diffusion of photogenerated catalyst in chemically amplified resists
Inventor :
Grober, Robert D.
;
Feke, Gilbert D.
Agent name :
Pizzeys Patent and Trade Mark Attorneys
Address for service :
Level 20 324 Queen Street Brisbane QLD 4000 Australia
Filing date :
17 April 2001
Associated companies :
Applicant name :
Yale University
Applicant address :
451 College Street New Haven Connecticut 06511 United States of America