Detection system for nanometer scale topographic measurements of reflective surfaces
A Standard patent application filed on 18 November 1999 credited to Neilsen, Heinrik K. ; Nokes, Mark ; Kuhlmann, Lionel

Details

Application number :

17386  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Detection system for nanometer scale topographic measurements of reflective surfaces  

Inventor :

Neilsen, Heinrik K. ; Nokes, Mark ; Kuhlmann, Lionel  

Agent name :

 

Address for service :

 

Filing date :

18 November 1999  

Associated companies :

 

Applicant name :

Kla-Tencor Corporation  

Applicant address :

 

Old name :

 

Original Source :

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