Highly efficient compact capacitance coupled plasma reactor/generator and method
A Standard patent application filed on 23 March 2001 credited to Chiu, Kin-Chung Ray
Details
Application number :
2001249429
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Highly efficient compact capacitance coupled plasma reactor/generator and method