Silicon on insulator optical membrane structure for fabry-perot moems filter
A Standard patent application filed on 01 March 2001 credited to Flanders, Dale C. ; Whitney, Peter S. ; Miller, Michael F.

Details

Application number :
2001249082  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Silicon on insulator optical membrane structure for fabry-perot moems filter  
Inventor :
Flanders, Dale C. ; Whitney, Peter S. ; Miller, Michael F.  
Agent name :
 
Address for service :
 
Filing date :
01 March 2001  
Associated companies :
 
Applicant name :
Axsun Technologies, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor