Method for measuring the microrelief of an object and optical characteristics of near-surface layer, modulation interference microscope for carrying out said method
A Standard patent application filed on 23 January 2001 credited to Indukaev, Konstantin Vasilievich
;
Andreev, Vladimir Andreevich
;
Osipov, Pavel Albertovich
Details
Application number :
2001248933
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method for measuring the microrelief of an object and optical characteristics of near-surface layer, modulation interference microscope for carrying out said method
Inventor :
Indukaev, Konstantin Vasilievich
;
Andreev, Vladimir Andreevich
;
Osipov, Pavel Albertovich