Method of manufacturing group-iii nitride compound semiconductor device
A Standard patent application filed on 20 April 2001 credited to Ito, Jun
;
Senda, Masanobu
;
Chiyo, Toshiaki
;
Asami, Shizuyo
;
Shibata, Naoki
Details
Application number :
2001248803
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of manufacturing group-iii nitride compound semiconductor device