Device and method for depositing one or more layers onto a substrate
A Standard patent application filed on 02 February 2001 credited to Strauch, Gerd ; Jurgensen, Holger ; Strzyzewski, Piotr ; Dauelsberg, Martin ; Schumacher, Marcus

Details

Application number :

2001242363  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Device and method for depositing one or more layers onto a substrate  

Inventor :

Strauch, Gerd ; Jurgensen, Holger ; Strzyzewski, Piotr ; Dauelsberg, Martin ; Schumacher, Marcus  

Agent name :

 

Address for service :

 

Filing date :

02 February 2001  

Associated companies :

 

Applicant name :

Aixtron AG  

Applicant address :

 

Old name :

 

Original Source :

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