Plasma ion source and method

Application number :: 2001237845
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Plasma ion source and method
Inventor :: Kralkina, Elena Alexandrovna ; Pavlov, Vladimir Borisovich ; Kondranin, Sergei Gennadievich ; Bugrov, Gleb Elmirovich
Agent name :
Address for service :
Filing date :: 14 February 2001
Associated companies :
Applicant name :: Plasma Tech Co., Ltd.
Applicant address :
Old name :
Original Source :: Go

Plasma ion source and method A Standard patent application filed on 14 February 2001 credited to Kralkina, Elena Alexandrovna ; Pavlov, Vladimir Borisovich ; Kondranin, Sergei Gennadievich ; Bugrov, Gleb Elmirovich