Production method of iii nitride compound semiconductor substrate and semiconductor device
A Standard patent application filed on 02 March 2001 credited to Koike, Masayoshi
;
Tezen, Yuta
;
Nagai, Seiji
Details
Application number :
2001236076
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Production method of iii nitride compound semiconductor substrate and semiconductor device