Detection and handling of semiconductor wafers and wafer-like objects
A Standard patent application filed on 13 January 2001 credited to Berger, Alexander J.
;
Casarotti, Sean A.
;
Kretz, Frank E.
Details
Application number :
2001234799
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Detection and handling of semiconductor wafers and wafer-like objects
Inventor :
Berger, Alexander J.
;
Casarotti, Sean A.
;
Kretz, Frank E.