Gas supply device for precursors with a low vapor pressure
A Standard patent application filed on 27 January 2001 credited to Kupper, Thomas ; Klippe, Lutz

Details

Application number :
2001228504  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Gas supply device for precursors with a low vapor pressure  
Inventor :
Kupper, Thomas ; Klippe, Lutz  
Agent name :
 
Address for service :
 
Filing date :
27 January 2001  
Associated companies :
 
Applicant name :
Bauch, Hartmut  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor